发明名称 APPLICATION NEEDLE FIXING METHOD AND LIQUID STATE MATERIAL APPLICATION APPARATUS AND DEFECT CORRECTION APPARATUS
摘要 An application needle fixing method, a liquid material application device and a defect correction device using the same are provided to easily attach an application needle holder to a fixing base with good reproducibility by pressing the section of the application needle holder to a reference section of the fixing base with centripetal force generated between magnets. In an application needle fixing method for fixing an application needle(21) applying liquid material on a fine region of a substrate to a driving shaft(23) of a driving device, a base end portion of the application needle is fixed to an application needle holder(24). A fixing base(25) having first and second reference surfaces(E3,E4) is installed in the front end of the driving shaft. First and second magnets(M1,M2) are installed at the application needle holder and the fixing base respectively. The application needle holder is stuck to the first reference surface by magnetic absorption force generated between the first and second magnets. At the same time, sections(E1,E2) of the application needle holder are firmly pressed to the second reference surface by centripetal force generated between the first and second magnets when the first and second magnets are misaligned in parallel to the first reference surface.
申请公布号 KR20070068998(A) 申请公布日期 2007.07.02
申请号 KR20060098332 申请日期 2006.10.10
申请人 NTN CORPORATION 发明人 MATSUSHIMA AKIRA;YAMANAKA AKIHIRO
分类号 G02B5/20 主分类号 G02B5/20
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