| 摘要 |
A head of an SMIF(Standard Mechanical InterFace) and a controlling method thereof are provided to restrain the loading fail due to the deformation of a cassette, to prevent the drop of a wafer under a cassette transferring process, and to improve the uptime of the SMIF by detecting a loading stage of the cassette using a plurality of micro switches. A head includes a head body fixed to an arm(113) of an SMIF(110) and a plurality of grippers. The plurality of grippers(124) moves at both sides of the head body. The gripper has a bent portion capable of interlocking a hanging jaw of a cassette. A support guide(201) is installed at a side of the gripper. A plurality of micro switches(127,128) are installed at an inner portion of the support guide and a lower end portion of the head body.
|
