APPARATUS FOR DRYING SUBSTRATE

摘要

An apparatus for drying a substrate is provided to prevent a slit or a nozzle from being stopped up and prevent a process defect of a substrate by supplying proper fluid to an air knife. A fluid supply part supplies fluid for drying a substrate. An open/shut valve(3) for passing through or blocking the fluid of the fluid supply part is formed in a valve body(5). A fluid injecting part injects the fluid passing through the valve body to the substrate. A bypass duct(11) which detours the open/shut valve is installed in the valve body, a flowrate control valve(13) controls the flowrate of the fluid passing through the bypass duct. The fluid control valve can be made of a needle valve for adjusting the flowrate.