SYSTEM FOR COMPENSATING LASER INTERFEROMETER AND METHOD THEREOF

摘要

A system for compensating laser interferometer and a method thereof are provided to estimate an optimal correction parameter using position information of a static capacity sensor and position information of a heterodyne laser interferometer. A system for compensating laser interferometer includes a measuring unit(10) to measure a displacement of a target, a preprocessing unit(20) to pre-process an output signal of the measuring unit, a correcting unit(30) to set a correction parameter to correct the measurement of the target processed by the preprocessing unit, and a mapper(40) to correct and output the measurement pre-processed by the preprocessing unit using the correction parameter set by the correcting unit. The correction value outputted by the mapper is outputted through an output unit(50). The measuring unit includes a heterodyne laser system(11) having two different frequencies and using two light sources orthogonally polarized with each other and a static sensor(12) to precisely measure a position with few nanometer unit precision. The heterodyne laser system has a performance of representing the position information of the target as an intensity of a signal.