| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum motor in which discharge of gas from the interior is suppressed and the vacuum environment is not contaminated. SOLUTION: The vacuum motor has a can 2 constituting a frame for surrounding any one of the moving member or the stator of the motor, and at least a part of the can 2 is composed of resin. The can 2 has a structure obtained by molding a metal frame 4 and a fiber reinforced plastic frame 3 integrally, and at least two layers of plating film 8 of different structure are formed at least on the surface of the fiber reinforced plastic frame 3 exposed to vacuum atmosphere. Thickness of the plating film 8 is preferably 0.01-0.03 mm. The metal frame 4 is secured to the housing 1 by welding. COPYRIGHT: (C)2007,JPO&INPIT
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