| 摘要 |
PROBLEM TO BE SOLVED: To provide an MBE device or the like that can maintain a constant film-formation rate regardless of a film-formation time. SOLUTION: The MBE device 100 is provided with molecular beam generators 10a/10b, vacuum gauges 14a/14b, an atomic absorptive film-formation monitor 8 having a light-source unit 6 and a light-receiving unit 7, and a temperature control calculator 13 for controlling temperatures of the molecular beam generators 10a/10b. The temperature control calculator 13 controls the temperatures of the molecular beam generators 10a/10b, so that a measurement result of the atomic absorptive film-formation monitor 8 becomes the control target value of the atomic absorptive film-formation monitor 8 calculated from a remaining amount of a molecular beam source calculated from measurement results of the vacuum gauges 14a/14b. COPYRIGHT: (C)2007,JPO&INPIT
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