METHOD FOR PRODUCING CARBON NANOTUBE ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a method for growing a satisfactorily arrayed carbon nanotube array. SOLUTION: The method for growing the carbon nanotube array includes a step for preparing a base material, a step for forming a catalyst on the base material, and a step for growing the carbon nanotube array on the base material at a prescribed temperature by introducing a reactive gas. The catalyst is formed on the base material at a speed of 0.5 nm/s. COPYRIGHT: (C)2007,JPO&INPIT