发明名称 SOLDER BALL ATTACH MACHINE HAVING IMPROVED PICK-UP PERFORMANCE AND CONTROL METHOD THEREOF
摘要 A solder ball attach apparatus with an enhanced solder ball holding function and a controlling method thereof are provided to perform quickly effectively a solder ball attach process on a substrate or a wafer by separating selectively abnormal solder balls alone using a solder ball separating unit. A solder ball attach apparatus includes a solder ball storing unit(120) for storing a plurality of solder balls, a solder ball cartridge transfer unit, and a solder ball separating unit. The solder ball cartridge transfer unit(110) is used for transferring a solder ball cartridge with a plurality of solder ball loading holes to an aiming position corresponding to patterns of a substrate. The solder ball cartridge transfer unit includes a suction pipe. The suction pipe supplies a first suction to the solder ball loading holes, so that the solder balls are partially inserted into the solder ball loading holes. The solder ball separating unit(130) supplies a second suction to the solder ball loading holes in order to separate abnormal solder balls alone from the solder ball loading holes.
申请公布号 KR100735517(B1) 申请公布日期 2007.06.28
申请号 KR20070032165 申请日期 2007.04.02
申请人 KOREA SEMICINDUCTOR SYSTEM CO., LTD. 发明人 KIM, YONG HWA
分类号 H01L21/60 主分类号 H01L21/60
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