| 摘要 |
PROBLEM TO BE SOLVED: To provide a mounting method for a probe card that can simplify a mechanism and a stage for mounting and demounting the probe card even when the probe card increases in weight, and to provide a probe card transferring and loading assisting device used therefor. SOLUTION: The mounting method for the probe card includes a stage of conveying the probe card 45 to an area nearby an inspection device, a stage of reloading the probe card 45 to a card holder 46 which can be elevated on a top surface of a prober chamber 42, a stage of disposing a test head T on the top surface of the prober chamber 42, and a stage of bringing the probe card 45 and test head T into electric contact with each other. The transferring and loading stage of the probe card 45 includes a holding stage of the probe card 45 using the probe card transferring and loading assisting device 10, the elevating stage of the probe card 45, and the state of moving the probe card 45 to the card holder 46 on the top surface of the prober chamber 42. COPYRIGHT: (C)2007,JPO&INPIT
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