| 摘要 |
PROBLEM TO BE SOLVED: To realize a prober which can make a probe and an electrode pad contact at all times at a desired contact pressure in multi-probing. SOLUTION: The prober to connect the each terminal of a tester to an electrode of a semiconductor device for inspecting a semiconductor device 41 formed on a wafer W by a tester 30 is equipped with a probe card 25 having a probe 26 to contact the electrode, a wafer stage 18, a moving mechanism 12-17, and a movement control portion 27. The movement control unit controls the movement control mechanism so that, after the electrode of the semiconductor device moves so as to be positioned right under the probe, the wafer stage is moved in the first direction to the move end position against the probe so as to make the electrode contact the probe. In the prober, the probe card is provided with a plurality of probes to inspect a plurality of semiconductor devices at the same time, the movement control unit changes the movement end position according to the number of the probe which contacts. COPYRIGHT: (C)2007,JPO&INPIT
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