| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for forming a microsphere capable of exerting a stable performance, by forming the microshere of a fixed size. SOLUTION: A microsphere raw material 11 containing a liquid organometallic compound or a liquid organosilicon compound is atomized to obtain a liquid particulate 15. The liquid particulate 15 is heated to decompose the liquid organometallic compound or the liquid organosilicon compound and subsequently cooled to form the microsphere 15b. The microsphere 15b is deposited on a semiconductor wafer 18 to form a porous membrane 17 comprising the microsphere 15b. COPYRIGHT: (C)2007,JPO&INPIT
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