发明名称 Method for forming pattern and method for fabricating LCD device using the same
摘要 A method for forming a pattern and a method for fabricating an LCD device using the same is disclosed, wherein a photoresist layer is removed from a substrate without using a photoresist stripper, so that the pattern is formed with a low fabrication costs. The method comprising sequentially forming a pattern material layer, a transformed material layer and a photoresist layer on a substrate; patterning the photoresist layer by exposure and development using a mask; selectively etching the transformed material layer and the pattern material layer by using the patterned photoresist layer as a mask; and removing the transformed material layer and the patterned photoresist layer in a lift-off method by applying light.
申请公布号 US2007148603(A1) 申请公布日期 2007.06.28
申请号 US20060640985 申请日期 2006.12.19
申请人 LEE HYE S;OH JAE Y 发明人 LEE HYE S.;OH JAE Y.
分类号 G03F7/26 主分类号 G03F7/26
代理机构 代理人
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