| 发明名称 |
APPARATUS AND METHOD FOR TESTING DEFECTS |
| 摘要 |
A method for detecting defects on a specimen includes mounting a specimen on a table with which is movable, obliquely projecting a laser as a line onto a surface of the specimen, detecting with an image sensor an image of light formed by light reflected from the specimen and passed through a filter which blocks scattered light resulting from repetitive patterns formed on the specimen, processing a signal outputted from the image sensor to extract defects of the specimen, and a displaying information of defects extracted by the signal processor.
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| 申请公布号 |
US2007146696(A1) |
申请公布日期 |
2007.06.28 |
| 申请号 |
US20070681981 |
申请日期 |
2007.03.05 |
| 申请人 |
NOGUCHI MINORI;OHSHIMA YOSHIMASA;NISHIYAMA HIDETOSHI;MATSUMOTO SHUNICHI;KEMBO YUKIO;MATSUNAGA RYOUJI;SAKAI KEIJI;NINOMIYA TAKANORI;WATANABE TETSUYA;NAKAMURA HISATO;JINGU TAKAHIRO;MORISHIGE YOSHIO;CHIKAMATSU SHUICHI |
发明人 |
NOGUCHI MINORI;OHSHIMA YOSHIMASA;NISHIYAMA HIDETOSHI;MATSUMOTO SHUNICHI;KEMBO YUKIO;MATSUNAGA RYOUJI;SAKAI KEIJI;NINOMIYA TAKANORI;WATANABE TETSUYA;NAKAMURA HISATO;JINGU TAKAHIRO;MORISHIGE YOSHIO;CHIKAMATSU SHUICHI |
| 分类号 |
G01N21/88;G01N21/94;G01N21/95;G01N21/956;G01R31/308;H01J37/00;H01L21/00;H01L21/66;H01L21/68 |
主分类号 |
G01N21/88 |
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