| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard carbon film with a high matching property, which can immediately lower its friction coefficient in the initial stage of sliding and stabilize the friction coefficient at a low value in an early stage. SOLUTION: The hard carbon film 3 formed on a base material 1 through an intermediate layer 2 comprises a diamond-like carbon layer 6 and a graphite-particle deposition layer 7 formed on the diamond-like carbon layer 6. The graphite-particle deposition layer 7 shows the I<SB>D</SB>/I<SB>G</SB>of 1 or less, which is a ratio of an integrated intensity I<SB>D</SB>in a peak that represents a band (D) obtained by separating a peak of a Raman spectrum obtained from Raman spectroscopy, to an integrated intensity I<SB>G</SB>in a peak that shows a band (G). COPYRIGHT: (C)2007,JPO&INPIT |
