| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a dividing device and a dividing method, which suppress the occurence of thermal damage, which can divide an object with a simple structure and which have high productivity. <P>SOLUTION: Laser beams from a laser device 13 are condensed on the surface of a glass substrate 12 by a lens 15 consisting of a bi-focus lens and form first spot light 25 and second spot light 26 on the surface of the glass substrate 12. A softening area 27 irradiated with the second spot light 26 is heated to a temperature higher than the softening temperature Ts of the glass substrate 12. A heating area 28 which is an area irradiated with the first spot light 25 except the softening area 27 is heated to a temperature lower than the softening temperature Ts. The heating area 28 and the softening area 27 are relatively moved to the glass substrate 12 along a dividing scheduled line 22 by moving the glass substrate 12 to another direction of a first direction X and then the glass substrate 12 is divided along the dividing scheduled line 22. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
