| 摘要 |
PROBLEM TO BE SOLVED: To provide an eddy current flaw detection sensor capable of detecting a defect on a deep part and on a defective shell part, and discriminating and evaluating the defect highly accurately. SOLUTION: In this eddy current flaw detection sensor equipped with a plurality of excitation coils 4 and at least one detection coil 5, a coil axis P-P of the detection coil 5 is arranged to be horizontal to an inspection plane. A coil axis P-P of the excitation coils 4 may be set to be horizontal to the inspection plane or vertical thereto. A magnetic material 3 may be inserted into the inside of the excitation coils 4 and the detection coil 5. The shape of a substrate on which the excitation coil 4 and the detection coil 5 are mounted may be a flat shape or a cylindrical shape. COPYRIGHT: (C)2007,JPO&INPIT
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