| 摘要 |
PROBLEM TO BE SOLVED: To provide a designing method of a minute flow rate controller for accurately controlling a minute flow rate of a fluid, realizing a desired valve characteristic without inducing unstableness of a fluid flow, and having a throttle groove for controlling the minute flow rate with a simple shape. SOLUTION: The minute flow rate controller comprises an inflow passage 12 for introducing the fluid, a valve element 2 having a main throttle groove 6 formed thereon for making the introduced fluid flow from a starting end toward a finishing end, a fluid outflow port 20 opened at an optional cross section by a flow rate adjusting member, and an outflow passage 14 for leading out the fluid flowing out from the fluid outflow port 20. In this designing method of the minute flow rate controller with the entrance throttle groove, the entrance throttle groove 8 is provided communicably preceding a starting end position of the main throttle groove 6, and based on a relational expression derived from the momentum equation of the fluid flowing in the entrance throttle groove 8 and the main throttle groove 6, the size of the entrance throttle groove 8 is determined so that a desired flow resistance is displayed. COPYRIGHT: (C)2007,JPO&INPIT
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