| 摘要 |
PROBLEM TO BE SOLVED: To provide a system for manufacturing a flat panel display capable of processing large-area glass substrates in a batch system and increasing productivity thereof. SOLUTION: The system for manufacturing the flat panel display is provided with a batch type boat used in a heat treatment process in order to improve a processing amount by processing a large number of the glass substrates in one reaction chamber, an end effector linked with the boat, a nozzle system for supplying a uniform source gas to the large-area glass substrates, a reaction chamber for forming diversified heat treatment environments, a filling device for automatically performing filling at the time of quenching of source powder when the source gas is supplied, a sealing device for preventing the leakage of a waste gas to the outside in a standby chamber, and a transfer device which is mounted by evading a heat loss area between the standby chamber and a transfer chamber and can perform substrate mounting to the batch type boat of a large capacity even with a small-sized gate. COPYRIGHT: (C)2007,JPO&INPIT
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