| 摘要 |
<P>PROBLEM TO BE SOLVED: To materialize an XY stage capable of position-controlling a plurality of slider parts at arbitrary positions on the same platen without any restrictions imposed on the size of bar mirrors. <P>SOLUTION: This XY stage for two-dimensionally position-controlling the quadrilateral slider parts on the quadrilateral platen, is equipped with the bar mirrors provided on at least three sides out of the four sides of each of the slider parts and a plurality of laser interferometers fixedly disposed along at least two sides out of the four sides of the platen for receiving reflected light of laser beams applied to the bar mirrors. <P>COPYRIGHT: (C)2007,JPO&INPIT |
