发明名称 METHOD AND DEVICE FOR DIE PICKUP
摘要 PROBLEM TO BE SOLVED: To eliminate the variability in judgement of workers and to surely adjust the push-up height level of a push-up pin. SOLUTION: A check jig 60 is mounted on a push-up stage 54 to blockade a suction passage 58. Subsequently, a teaching key 84 is pushed and a CPU 70 drives an up-and-down shaft of a driving motor 18 to descend an attracting and loading nozzle 22 so as to push the check jig 60 against the pushup stage 54, and then a vacuum source is put ON so that the attracting and loading nozzle 22 attracts the check jig 60 while the check jig 60 attracts the pushup stage 54. When an operation switch 88 is operated, the CPU 70 drives the up-and-down shaft driving motor 43 at a low speed through a driving circuit 74 and the ascending pushup pin 41 is abutted against the lower surface of the check jig 60. Accordingly, the check jig 60 is elevated higher than the upper surface of pushup stage 54, and is stored into an RAM 71 while defining the height level of the pushup pin 41 when the check jig 60 is elevated higher than the upper surface of the pushup stage 54, and a vacuum degree measured by a vacuum sensor 23 is lowered as the position of an original point. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007165666(A) 申请公布日期 2007.06.28
申请号 JP20050361220 申请日期 2005.12.15
申请人 HITACHI HIGH-TECH INSTRUMENTS CO LTD 发明人 HINENO KAZUHIRO;ICHIKAWA YOSHIO
分类号 H01L21/67;H01L21/52 主分类号 H01L21/67
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