| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a workpiece polishing method using electrolytic reduction water, capable of reducing cost, carrying out polishing with favorable surface precision, and easily conducting disposal of waste fluid. <P>SOLUTION: In the workpiece polishing method, a workpiece is pressed to a polishing member, and as the polishing fluid is supplied, the workpiece and the polishing member are relatively moved to each other, so that the workpiece is polished. For a polishing fluid, electrolytic reduction water obtained by conducting electrolysis to electrolyte salt solution is used for polishing the workpiece. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
