| 摘要 |
An apparatus for manufacturing a semiconductor having a wafer alignment unit for sensing abnormality of a driving belt is provided to perform a process for manufacturing the semiconductor in a stable manner by using a sensor installed in the wafer alignment. An apparatus for manufacturing a semiconductor includes a wafer alignment unit(300). The wafer alignment unit has a driving roller(310), an alignment roller(320), a driving belt(330), a support roller(340), and a sensor(350). The alignment roller aligns flat zones of wafers to each other. The driving belt receives a rotational force from the driving roller to drive the alignment roller. The support roller causes the driving belt to be elastic. The sensor generates a signal for denoting a state change of the driving belt. The sensor is composed of first and second sensors which are disposed to face each other with the driving belt positioned therebetween.
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