Method for manufacturing X-ray detector

摘要

A first protective layer (31) is formed on the surface of a photoelectric conversion substrate (2) on which photoelectric transducers (8) have been provided, and then, a scintillator layer (32) is formed thereon, whereby degradation of the photoelectric transducers (8) due to the contact with the scintillator layer (32) is prevented. A second protective layer (33) covering the surface of the scintillator (32) is formed. A peripheral part (31a) of the first protective layer (31) is allowed to be in close contact with a peripheral part (33a) of the second protective layer (33) to seal the scintillator layer (32) between the first protective layer (31) and the second protective layer (32), whereby degradation of the scintillator layer (32) due to the moisture in the atmospheric air is prevented.