发明名称 Method of fabricating nanodevices
摘要 A method of batch fabrication using established photolithographic techniques allowing nanoparticles or nanodevices to be fabricated and mounted into a macroscopic device in a repeatable, reliable manner suitable for large-scale mass production. Nanoparticles can be grown on macroscopic "modules" which can be easily manipulated and shaped to fit standard mounts in various devices.
申请公布号 EP1801068(A2) 申请公布日期 2007.06.27
申请号 EP20060126836 申请日期 2006.12.21
申请人 FEI COMPANY 发明人 SCHWIND, GREGORY;MAGERA, GERALD;SCIPIONI, LAWRENCE
分类号 B82B3/00 主分类号 B82B3/00
代理机构 代理人
主权项
地址