发明名称 |
Method of fabricating nanodevices |
摘要 |
A method of batch fabrication using established photolithographic techniques allowing nanoparticles or nanodevices to be fabricated and mounted into a macroscopic device in a repeatable, reliable manner suitable for large-scale mass production. Nanoparticles can be grown on macroscopic "modules" which can be easily manipulated and shaped to fit standard mounts in various devices. |
申请公布号 |
EP1801068(A2) |
申请公布日期 |
2007.06.27 |
申请号 |
EP20060126836 |
申请日期 |
2006.12.21 |
申请人 |
FEI COMPANY |
发明人 |
SCHWIND, GREGORY;MAGERA, GERALD;SCIPIONI, LAWRENCE |
分类号 |
B82B3/00 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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