METHOD FOR FORMING PIEZO-ELECTRIC ACTUATOR OF INK-JET PRINT HEAD

摘要

A method for forming piezoelectric actuator of ink-jet print head is provided to reduce processing time by forming a plurality of piezoelectric actuators simultaneously and to increase strength in order to reduce vibration. A method for forming piezoelectric actuator of ink-jet print head includes the steps of providing a vibration plate(S100), selectively forming a lower electrode through a metal deposition on the vibration plate(S200), coating conductive adhesive on piezoelectric plate bonding region of the vibration plate(S300), adhering the piezoelectric plate with electrodes formed on both sides in the piezoelectric plate bonding region(S400), and slicing the piezoelectric plate to form unit piezoelectric actuators in correspondence with outer circumference for partitioning a pressing chamber. In the step(S100), a ceramic vibration plate is used as the vibration plate. In the step(S200), the lower electrode is formed at a position corresponding to the pressing chamber. Prior to the step(S100), a step of integrating the vibration plate with the pressing chamber is provided.