| 摘要 |
A method of enhanced sterilization with improved material compatibility. Th e following enhancements have been made. First, repeated venting , evacuation, and plasma treatments can be performed in the pre-plasma stage. Second, a lower power level can be used in the post-plasma stage than in the pre-plasma stage. Third, after the post-plasma-stage, the chamber can be held at atmospheric pressure or sub-atmospheric pressure for a period of time after venting, before re-evacuating the chamber, rather than evacuating after the chamber is vented to atmospheric pressure or sub-atmospheric pressure. A ny of the three enhancements may be used separately, and it is not necessary to practice all three enhancements to obtain at least some of the benefits of enhanced sterilizati on with improved material compatibility.
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