MICRO ACTUATOR USING MAGNETOSTRICTIVE THIN FILM

摘要

A micro actuator using a magnetostrictive thin film is provided to select a frequency of a magnetic field transmitted to the micro actuator to adjust a moving direction of the micro actuator. A micro actuator using a magnetostrictive thin film includes a body(10), a first plate(20), a second plate(30), a first magnetostrictive thin film(40), a second magnetostrictive thin film(50), and a remote controller(60). The body has a streamlined shape to reduce resistance of fluid. The first plate and the second plate are semiconductor substrates or polyimide films. The first magnetostrictive thin film and the second magnetostrictive thin film are deposited on upper and lower surfaces of the first plate and the second plate to be magnetically deformed according to a frequency of a magnetic field transmitted from the external remote controller.