METHOD FOR MANUFACTURING METALLIC MOLD FOR ASPHERICAL MICROLENS, METHOD FOR MANUFACTURING MICROLENS, MICROLENS, MICROLENS ARRAY AND LASER BEAM SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a metallic mold for a microlens by which a microlens having an incident surface and an emitting surface formed of an accurate aspherical lens surface is obtained.

SOLUTION: A water-repellent chemisorb monomolecular film 207 on which an elliptical hole P is formed is formed on a Si substrate 201 on which a SiO2layer 202 is formed. Then, UV curing material 209 is dripped in the hole P and cured. By setting the shape of the hole P and the dripping amount of the UV curing material 209 to values calculated previously, the surface shape of the cured UV curing material 209 is made a desired aspherical lens surface. By transferring the surface shape of the UV curing material 209 to an electrodeposited layer 211 formed by electroforming, the metallic mold for the aspherical lens is formed.

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