发明名称 METHOD AND APPARATUS FOR ESTIMATING DEFECTIVE PROCESS, PROGRAM, AND STORAGE MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a defective process estimating method for estimating whether a manufacturing process using only one manufacturing apparatus is a defect generating factor to generate defective products. SOLUTION: A manufacturing process S using only a manufacturing apparatus 1 is included within manufacturing processes S0, S, and T0, and the processes with such manufacturing apparatus 1 are eliminated in accordance with kinds of the products. In regard to each product obtained through the manufacturing process thereof, the processed/non-processed item number data are collected indicating the number of products processed with the manufacturing apparatus 1 and the number of products to which the processes are eliminated with the manufacturing apparatus 1, and the good-product/defective-product item number data are also collected indicating the number of good products obtained as the result of inspection in the inspecting process T0 and the number of defective products. Whether the manufacturing process S is a cause of generating defective product or not is estimated on the basis of the above processed/non-processed item number data and the good-product/defective product item number data. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007157816(A) 申请公布日期 2007.06.21
申请号 JP20050347744 申请日期 2005.12.01
申请人 SHARP CORP 发明人 YAMADA EIJI
分类号 H01L21/02;H01L21/66 主分类号 H01L21/02
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