发明名称 Thin-film capacitor and method for fabricating the same, electronic device and circuit board
摘要 The thin-film capacitor comprises a capacitor part 20 formed over a base substrate 10 and including a first capacitor electrode 14 , a capacitor dielectric film 16 formed over the first capacitor electrode 14 , and a second capacitor electrode 18 formed over the capacitor dielectric film 16 ; leading-out electrodes 26 a, 26 b lead from the first capacitor electrode 14 or the second capacitor electrode 18 and formed of a conducting barrier film which prevents the diffusion of hydrogen or water; and outside connection electrodes 34 a, 34 b for connecting to outside and connected to the leading-out electrodes 26 a, 26 b.
申请公布号 US2007141800(A1) 申请公布日期 2007.06.21
申请号 US20060393910 申请日期 2006.03.31
申请人 FUJITSU LIMITED 发明人 KURIHARA KAZUAKI;SHIOGA TAKESHI;BANIECKI JOHN D.;ISHII MASATOSHI
分类号 H01L21/20 主分类号 H01L21/20
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