摘要 |
The thin-film capacitor comprises a capacitor part 20 formed over a base substrate 10 and including a first capacitor electrode 14 , a capacitor dielectric film 16 formed over the first capacitor electrode 14 , and a second capacitor electrode 18 formed over the capacitor dielectric film 16 ; leading-out electrodes 26 a, 26 b lead from the first capacitor electrode 14 or the second capacitor electrode 18 and formed of a conducting barrier film which prevents the diffusion of hydrogen or water; and outside connection electrodes 34 a, 34 b for connecting to outside and connected to the leading-out electrodes 26 a, 26 b.
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