| 摘要 |
PROBLEM TO BE SOLVED: To provide a flaw inspection method which enables precise and automatic detection of the uneven flaw of a fed inspection target such as a sheetlike article or the like. SOLUTION: The surface of the fed inspection target is irradiated with the light from a floodlight projection part at a definite irradiation angle while the light reflected from the surface of the inspection target is detected by a light detection part and the flaw of the inspection target is detected on the basis of the intensity of the detected light. In this flaw inspection method. The floodlight projection part is covered with a shading material with a predetermined width from its end part in the feed direction of the inspection target and, when the output of the floodlight projection part is made constant, the intensity of the reflected light from the inspection target detected by the light detection part becomes low as compared with the case where the floodlight projection part is not covered with the shading material. COPYRIGHT: (C)2007,JPO&INPIT
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