| 摘要 |
PROBLEM TO BE SOLVED: To easily prepare a specimen for observation having a thin portion with an observing object disposed thereon. SOLUTION: This specimen for observation, including the observing object 1, comprises first and second planes. An angle formed by the second plane with the first plane is within the range of 1.5°to 4.5°. The shortest distance between the first and second planes is 0.5μm or less. The preparation method of the specimen for observation is equipped with a process for bonding a plane 11M for bonding of a material 10M to a plane 21 for work of a support member 20, and a process for performing work including polish on the support member 20 and the material 10M so that the material 10M makes a specimen for observation. In the process for bonding, out of an outer edge of the plane 11M for bonding, a portion closest to the observing object 1 is disposed inside of an outer edge of the plane 21 for work. In the process for performing work, a first polished surface 51 is formed on the support member 20 while a second polished surface 52 is formed on the material 10M. The plane 11M for bonding serves as the first plane while the polished surface 52 serves as the second plane. COPYRIGHT: (C)2007,JPO&INPIT
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