METHOD FOR MANUFACTURING ELECTRO-OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an electro-optical device with which fluctuation in electric characteristics of a nonlinear element is prevented and uneven contrast is suppressed. SOLUTION: The method for manufacturing an electro-optical device having a plurality of nonlinear elements on a substrate includes: a step of forming a plurality of conducting patterns 50 to form nonlinear elements and a power supply pattern 55 having a main line 55a, a first branched line 55b branched from the main line 55a and extending in a predetermined direction, and a second branched line 55c branched from the first branched line 55b and extending in a direction intersecting the predetermined direction and electrically connected to the plurality of conducting patterns 50; and an anodization step of supplying power to the conducting pattern 50 through the power supply pattern 55 to form an oxide film on the surface of the conducting pattern 50 so as to form the insulating layer of the nonlinear element. At least the first branch line 55b and the second branch line 55c of the power supply pattern 55 are formed to have the same width. COPYRIGHT: (C)2007,JPO&INPIT