| 摘要 |
PROBLEM TO BE SOLVED: To properly control a liquid pressure as desired without complicating configuration in a liquid supplying system capable of distributing/supplying a liquid to a plurality of use points. SOLUTION: The system is provided with a supplying line 12 that allows a liquid to flow, a pump 13 provided halfway the line 12, and a plurality of branched lines LN1 to LNn provided by branching them from the line 12, the flow of the liquid in each line is allowed or inhibited by individually opening/closing each branched line LN1 to LNn by an opening/closing valve 21, and a pressure feedback control is executed by operating a pressure adjusting actuator relief valve 31 and an electropneumatic regulator 32 so as to allow the liquid pressure detected downstream a branched point of each branched line LN1 to LNn to match with a target value. Particularly, a controller 35 monitors the number of opened branched lines, and changes a controlling form in a pressure feedback control, based on the monitoring results. COPYRIGHT: (C)2007,JPO&INPIT
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