PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a pattern forming apparatus which suppresses the degradation in the accuracy of pattern formation due to yawing of a substrate by correcting the ink discharge timing of heads and realizes pattern formation of high accuracy.

SOLUTION: The pattern forming apparatus 1 is provided with the two scale read heads 65 in positions symmetrical to the middle of a load part in a substrate load part for loading a substrate 3. The outputs of the two scale read heads 65 are converted to the pulses indicating position information with respectively two position encoders 91 and the pulses are inputted to a controller 41. A time gap measuring section 93 of the controller 41 detects the yawing of the substrate 3 and corrects the ejection timing for every nozzle ejection hole 69 of the heads 67, thereby correcting the mispositioning of the pattern formation.

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