THIN FILM TRANSISTOR ARRAY SUBSTRATE AND MANUFACTURING METHOD OF THE SAME

摘要

A TFT(Thin Film Transistor) array substrate and its manufacturing method are provided to enhance the flatness of the TFT array substrate and to improve the capacitance of a parasitic capacitor by using a main gate insulating layer made of organic material and a sub gate insulating pattern made of ferroelectric material. A gate pattern composed of a gate electrode(8) and a gate line(2) is formed on a substrate. A main gate insulating layer(45) made of organic material is formed on the resultant structure to cover the gate pattern. A semiconductor pattern is overlapped with the gate electrode. A source/drain pattern crosses a data line on the semiconductor pattern. The source/drain pattern includes a source electrode and a drain electrode. A TFT is formed at a crossing region between the gate line and the data line. A protection layer includes a contact hole for exposing the drain electrode of the TFT to the outside. A pixel electrode(18) contacts the drain electrode through the contact hole. A sub gate insulating pattern(52) made of ferroelectric material is overlapped with the gate pattern between the gate pattern and the main gate insulating layer.