发明名称 POSITIVE PHOTOSENSITIVE COMPOSITION
摘要 Provided is a positive photosensitive composition excellent in an etching factor and adhesion. The composition includes: (A) an alkali-soluble high molecular substance having in the molecule thereof at least one carboxyl group, (B) a photo-thermal conversion material which absorbs infrared rays from an image exposure light source to convert the rays to heat, and (C) a silane coupling agent. The silane coupling agent (C) is preferably a silane coupling agent having an alkoxysilyl group and at least one functional group selected from the group consisting of imidazole, vinyl, epoxy, methacryloxy, acryloxy, amino, mercapto, isocyanate, styryl, and polysulfide groups.
申请公布号 EP1798598(A1) 申请公布日期 2007.06.20
申请号 EP20050805256 申请日期 2005.10.25
申请人 THINK LABORATORY CO., LTD. 发明人 SATO, TSUTOMU
分类号 G03F7/075;G03F7/039 主分类号 G03F7/075
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