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发明名称
METHOD AND SYSTEM FOR FLOW MEASUREMENT AND VALIDATION OF A MASS FLOW CONTROLLER
摘要
申请公布号
EP1797489(A2)
申请公布日期
2007.06.20
申请号
EP20050772286
申请日期
2005.07.07
申请人
CELERITY, INC.
发明人
TISON, STUART, A.;SUKUMARAN, SANDEEP;BARKER, JAMES
分类号
G05D7/06
主分类号
G05D7/06
代理机构
代理人
主权项
地址
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