SUBSTRATE CONVEYER AND SUBSTRATE CONVEYING METHOD

摘要

A substrate conveyor and a substrate conveying method are provided to support and convey a glass substrate by using a fluid, with a drive roller not physically making contact with the glass substrate. A substrate conveyor includes a plurality of floating injection members(222) and an interruption unit. The floating injection members float a substrate by injecting a fluid upward. The interruption unit partially interrupts the fluid injected from the floating injection members. The substrate conveyor includes a fluid supply unit(300) and a fixing mesh plate(220) injecting the fluid supplied from the fluid supply unit upward. The interruption unit is an operation plate(230) movably located on one surface of the fixing plate and having a predetermined width in the movement direction.