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发明名称
TWO-STEP OXIDATION PROCESS FOR SEMICONDUCTOR WAFERS
摘要
申请公布号
EP1797586(A2)
申请公布日期
2007.06.20
申请号
EP20050800582
申请日期
2005.10.06
申请人
X-FAB SEMICONDUCTOR FOUNDRIES AG
发明人
LERNER, RALF;ECKOLDT, UWE
分类号
H01L21/762
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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