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发明名称
Thin film forming apparatus
摘要
申请公布号
EP1536036(B1)
申请公布日期
2007.06.20
申请号
EP20040026917
申请日期
2004.11.12
申请人
SHARP KABUSHIKI KAISHA
发明人
OKADA, HIDEO;IMANAKA, TAKAO
分类号
C23C18/02;C03C17/00;C03C17/25
主分类号
C23C18/02
代理机构
代理人
主权项
地址
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