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发明名称
摘要
申请公布号
JP3932929(B2)
申请公布日期
2007.06.20
申请号
JP20020046297
申请日期
2002.02.22
申请人
发明人
分类号
H01L21/8234;H01L27/04;H01L21/822;H01L27/06
主分类号
H01L21/8234
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代理人
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