| 摘要 |
A wafer loading apparatus is provided to prevent damage of a wafer due to clamping error by recognizing an opening operation of a clamping fence irrespective of an operation of a pusher. A disc pad has a clamp fence(140) fixing a wafer, and a pusher is moved back and forth at a rear(120b) of the disc pad to operate the clamp fence. The operation of the clamp fence is detected by a sensor(170) which is installed on the rear of the disc pad. The clamp fence is opened by forward operation of the pusher toward the rear of the disk pad, and is closed by reward operation of the pusher away from the rear of the disc pad.
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