发明名称 METHOD FOR GROWING CARBON NANOTUBES AND MANUFACTURING METHOD OF FIELD EMISSION DEVICE THEREWITH
摘要 A method for growing a carbon nanotube and a method for manufacturing a field emission device using the same are provided to enhance electric field emission characteristic by lowering density of the carbon nanotube to a predetermined level. A catalyst metal layer(40) is formed on a substrate(10) in order to catalyze a growth of a carbon nanotube. An amorphous carbon layer(45), which partially covers the catalyst metal layer, is formed on the catalyst metal layer. The carbon nanotube(50) is grown from a surface of the catalyst metal layer, which is not covered with the amorphous carbon layer. A silicon(Si) layer(30) is formed on the substrate including a glass. The carbon nanotube is formed by a thermal chemical vapor deposition scheme.
申请公布号 KR20070062711(A) 申请公布日期 2007.06.18
申请号 KR20050122426 申请日期 2005.12.13
申请人 SAMSUNG SDI CO., LTD. 发明人 KIM, HA JIN;HAN, IN TAEK
分类号 H01J1/304 主分类号 H01J1/304
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