MULTI-METAL COPLANAR WAVEGUIDE

摘要

A multi-layer wiring coplanar waveguide is provided to minimize the loss of a coplanar waveguide and to maximize slow-wave effect by using an intermediate metal layer having a width less than that of a ground. An uppermost metal layer is designed with a ground(41)-signal(40)-ground(41). An intermediate layer(43) has a structure for maximizing volume where an electromagnetic wave propagates. A lowermost metal layer is used as a shield layer and connected through the ground of the uppermost metal layer, the intermediate layer, and the via-hole. The intermediate layer is comprised of a plurality of intermediate metal layers located at a lower of the ground of the uppermost metal layer. The intermediate metal layers have a width less than that of the ground.