| 摘要 |
A plasma generator having a ferrite core having a multi-frequency induction coil and a plasma processing apparatus having the same are provided to prevent a substrate from being damaged by the impact of an ion particle of high energy by lowering the energy of first and second induction electromotive forces which are transferred to an external discharge tube. A plasma generator having a ferrite core having a multi-frequency induction coil includes a first power supply source(40), a second power supply source(42), a plasma discharge tube(20), a ferrite core(30), a first induction coil(31), and a second induction coil(33). The first power supply source(40) has a first frequency. The second power supply source(42) has a second frequency. The ferrite core(30) is installed on the plasma discharge tube(20). The first induction coil(31) is wound around the ferrite core(30), and is connected to the first power supply source(40). The second induction coil(33) is wound around the ferrite core(30), and is connected to the second power supply source(42). The ferrite core(32) has a multi frequency induction coil which generates a plasma to the plasma discharge tube(20) by a second induction electromotive force generated from the second induction coil(33) by the first induction electromotive force and the second frequency generated from the first induction coil(31) by the second frequency. |
