| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam irradiation apparatus which is easy to handle and performs a highly precise machining. <P>SOLUTION: A hollow optical fiber 20 having a hollow part 23 is provided with: a light incident unit 40 in the incident end 21; and an exiting light condensing unit 50 in the exiting end 22. With a light exiting section 52 fitted to the fixing part 51 that is fixed on the exiting end 22 of the hollow optical fiber 20, an inner space surrounded by the hollow optical fiber 20, the fixing part 51, and the light exiting section 52, is closed except the opening of the hollow part 23 in the exiting end 22 of the hollow optical fiber 20. An inner space from the light incident unit 40 to the exiting light condensing unit 50 through the hollow optical fiber 20 is evacuated by an evacuating means 60. A laser beam outputted from the laser light source 10 is made incident on the incident end 21 of the hollow optical fiber 20, guided through the hollow part 23, emitted from the exiting end 22, and condensed outside by a window 53 as a condensing means possessed by the light exiting section 52. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
