| 摘要 |
PROBLEM TO BE SOLVED: To suppress the occurrence of a scratch when grinding a head slider. SOLUTION: A floating surface finish grinding process of a rover 21 performs polishing by oscillating a floating surface of the rover 21 on an inactive grinding plate 61. Then, in the oscillation grinding, the rover 21 is lifted up from the grinding plate 61 before the rover 21 stops on the grinding plate 61. Thus, the scratch is prevented from occurring in a head element part 122. In addition, it is desirable to lift the rover 21 up before the rover 21 decelerates on the grinding plate 61. COPYRIGHT: (C)2007,JPO&INPIT
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