| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface resistivity measuring device capable of measuring accurately a surface resistivity. SOLUTION: The interval between a surface electrode 30 and a surface electrode 32 is adjusted to be the same interval as the film thickness of a measuring object film 14 as a measuring member used as a measuring object, and the surface resistivity is calculated, based on a current value of a current flowing between the surface electrode 30 and the surface electrode 32 when a voltage having a prescribed voltage value is applied between the surface electrode 30 and the surface electrode 32, the voltage value of the voltage applied between the surface electrode 30 and the surface electrode 32, and the interval between the surface electrode 30 and the surface electrode 32. COPYRIGHT: (C)2007,JPO&INPIT
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