| 摘要 |
PROBLEM TO BE SOLVED: To provide a technical means to accurately adjust ion balance of positive and negative ions emitted from an ionizer, prior to static elimination of a workpiece. SOLUTION: When positive and negative ions are generated in a static eliminating region 14 by impressing positive and negative pulsed high voltages on positive and negative electrode needles 6, 7, and the charged workpiece W is carried into the static eliminating region 14 to eliminate static, before the workpiece W is carried into the static eliminating region 14, ion balance in the static eliminating region 14 is measured by using a surface potential sensor 2, the pulse width and/or the voltage value of the pulsed high voltage applied on the electrode needles 6, 7 are changed in accordance with the measured results, and thereby, an amount of ion generation from the electrode needles 6, 7 is adjusted to balance the positive and negative ions. COPYRIGHT: (C)2007,JPO&INPIT
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